The multipole resonance probe: simultaneous determination of electron density and electron temperature using spectral kinetic simulation

The investigation of the spectral kinetic model Multipole Resonance Probe (MRP) is presented and discussed in this paper. MRP a radio-frequency driven probe particular spherical design, which suitable for supervision control low-temperature plasma. importance effects was introduced previous study idealized MRP. Such particularly dominate energy loss low-pressure regime. Unfortunately, they are absent Drude model. With help scheme, those losses can be predicted, it enables us to obtain electron temperature from FWHM simulated resonance curve. Simultaneously, density derived frequency. Good agreements comparison between simulation measurement demonstrate suitability